| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring device capable of accurately and inexpensively evaluating the shape of a measurement object by measuring the shape of the measurement object in a short time by allowing an interference fringe image of the whole of an effective range of the measurement object to be acquired at a time. SOLUTION: The shape measuring device includes an interference fringe acquisition means acquiring an interference fringe image by an interferometer 10, and a shape calculation means calculating shape data from the acquired interference fringe image. The shape measuring device is characterized by satisfying an relationship of an expression: ¾2d-nλ¾<λ/3, when it is assumed that a predetermined height of a step, a wavelength of a light source for the interferometer and (n) are d,λand an integer not smaller than 2, respectively. Thereby, the interference fringe image of the whole effective range of the measurement object including multiple steps of the predetermined height on a surface thereof can be acquired, and the shape thereof can be measured in a short time. COPYRIGHT: (C)2008,JPO&INPIT
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