| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for producing a cluster capable of efficiently obtaining the cluster of the desired size and efficiently depositing the obtained cluster on a base material. SOLUTION: In the cluster manufacturing device and the cluster manufacturing method, a pair of targets are arranged opposite to each other with a spacing therebetween, and inclined in the downstream side, a plurality of gas feed capillaries are arranged on the same plane with a spacing therebetween, a plasma source gas is fed in a sheet-like current between the pair of targets by a plasma source gas feed means constituted so that the ratio L/d of its diameter (d) mm to its length L mm is 500≤L/d, a vapor is produced from the pair of targets while the fed plasma source gas is in a plasma state, a cluster producing portion and a cluster growing portion are arranged in a communication part, and the vapor is captured by a hollow cylindrical capturing cylinder with its diameter being gradually reduced and introduced in the cluster growing portion. COPYRIGHT: (C)2008,JPO&INPIT
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