发明名称 APPARATUS AND METHOD FOR SEMICONDUCTOR BONDING
摘要 An apparatus for bonding semiconductor structures includes equipment for positioning a first surface of a first semiconductor structure directly opposite and in contact with a first surface of a second semiconductor structure and equipment for forming a bond interface area between the first surfaces of the first and second semiconductor structures by pressing the first and second semiconductor structures together with a force column configured to apply uniform pressure to the entire bond interface area between the first surfaces.
申请公布号 US2007296035(A1) 申请公布日期 2007.12.27
申请号 US20070766531 申请日期 2007.06.21
申请人 SUSS MICROTEC INC 发明人 GEORGE GREGORY;HANCOCK ETIENNE;CAMPBELL ROBERT
分类号 H01L27/12 主分类号 H01L27/12
代理机构 代理人
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