发明名称 INFRARED INTERFEROMETRIC-SPATIAL-PHASE IMAGING USING BACKSIDE WAFER MARKS
摘要 An interferometric-spatial-phase imaging (ISPI) system includes a substrate wafer. An alignment configuration is permanently embedded in the substrate wafer. The alignment configuration uses a global coordinate reference system by providing a plurality of global reference marks that encompass up to the entire substrate wafer. A plurality of alignment markings is provided on a surface in close proximity to the alignment configuration for obtaining continuous six-axis control of a scanning probe tip with respect to the global coordinate reference system.
申请公布号 WO2007121300(A3) 申请公布日期 2007.12.27
申请号 WO2007US66516 申请日期 2007.04.12
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY;MOON, EUCLID, E. 发明人 MOON, EUCLID, E.
分类号 G03F9/00 主分类号 G03F9/00
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