发明名称 |
INFRARED INTERFEROMETRIC-SPATIAL-PHASE IMAGING USING BACKSIDE WAFER MARKS |
摘要 |
An interferometric-spatial-phase imaging (ISPI) system includes a substrate wafer. An alignment configuration is permanently embedded in the substrate wafer. The alignment configuration uses a global coordinate reference system by providing a plurality of global reference marks that encompass up to the entire substrate wafer. A plurality of alignment markings is provided on a surface in close proximity to the alignment configuration for obtaining continuous six-axis control of a scanning probe tip with respect to the global coordinate reference system. |
申请公布号 |
WO2007121300(A3) |
申请公布日期 |
2007.12.27 |
申请号 |
WO2007US66516 |
申请日期 |
2007.04.12 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;MOON, EUCLID, E. |
发明人 |
MOON, EUCLID, E. |
分类号 |
G03F9/00 |
主分类号 |
G03F9/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|