发明名称 LITHOGRAPHY IMPRINTING SYSTEM
摘要 The present invention is directed towards a method and a system to create and maintain a desired environment in the vicinity of a nano-imprint lithography template by creation of a partial vacuum using channels or holes in the template holding the nano-imprint mold.
申请公布号 WO2007123805(A3) 申请公布日期 2007.12.27
申请号 WO2007US08075 申请日期 2007.04.02
申请人 MOLECULAR IMPRINTS, INC. 发明人 CHERALA, ANSHUMAN;LAD, PANKAJ, B.;MCMACKIN, IAN, M.;CHOI, BYUNG-JIN
分类号 B05D5/00 主分类号 B05D5/00
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