发明名称 METHOD OF CORRECTING NEEDLE POSITION, AND POTTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To highly precisely position the resin dropped from a needle in carrying out underfill potting. SOLUTION: The needle is positioned at a plurality of predetermined coordinate positions (X1, Y1), (X1+Px, Y1), ..., on an X-Y coordinate table, and resin is dropped from the needle at every positioned coordinate position for measuring positions. The coordinates of the actual dropped positions of respective resin A1 to A9 are derived by photographing the dropped resin A1 to A9 for measuring the positions by a camera. From the difference between the coordinates of the actual dropped position and the coordinates of the needle position when dropping the resin, the deviationsΔx1,Δy1,Δx2,Δy2, ..., between the actual resin position dropped from the needle and the needle position when dropping the resin are derived, and the correction of the needle position with respect to the camera is carried out by deriving the average value of the deviations. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007335898(A) 申请公布日期 2007.12.27
申请号 JP20070227349 申请日期 2007.09.03
申请人 ATHLETE FA KK 发明人 NOMURA RYUICHI
分类号 H01L21/56;B05D1/26 主分类号 H01L21/56
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