| 摘要 |
A surface texture measuring instrument includes a force sensor ( 1 ), an actuator ( 11 ) and a detector ( 12 ). The surface texture measuring instrument further includes: a scanning controller ( 54 ) that collects a detection signal from the force sensor ( 1 ) and drives the actuator such that the detecting signal coincides with a target measurement value; a touch signal generator ( 51 ) that generates a touch signal when the detection signal from the force sensor ( 1 ) coincides with the target measurement value; and a measurement value collecting unit ( 55 ) that collects a measurement value from a counter ( 26 ) at a predetermined time interval in a state where a fluctuation range of the detection signal from the force sensor ( 1 ) is within a preset range when a scanning controller is in operation, the latch counter ( 52 ) collecting a measurement value from a latch counter ( 52 ) each time the touch signal is generated in a state where the detection signal from the force sensor ( 1 ) oscillates and an amplitude exceeds the preset range.
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