发明名称 |
METHOD AND APPARATUS FOR TRANSPORTING, QUEUING, AND LOADING OF LARGE AREA SUBSTRATES IN MULTI-TOOL PROCESSING OPERATIONS |
摘要 |
A substrate support and transport system for substrates to be processed is provided. The substrate support system includes a conveying mechanism for supporting the substrate in a vertical orientation. The conveying mechanism includes a moveable base supporting a bottom edge of the substrate and a non-contact support arm providing support to a side of the substrate. The substrate support system includes a housing disposed over the moveable base and substantially enclosing the substrate and the non-contact support arm.An air supply providing an air supply directed from a top edge of the substrate toward the base is included in the substrate support and transport system. A method of transporting a substrate is also provided. |
申请公布号 |
WO2007150039(A2) |
申请公布日期 |
2007.12.27 |
申请号 |
WO2007US71920 |
申请日期 |
2007.06.22 |
申请人 |
ASYST TECHNOLOGIES, INC.;BONORA, ANTHONY, C. |
发明人 |
BONORA, ANTHONY, C. |
分类号 |
B65G47/24;B65G49/00 |
主分类号 |
B65G47/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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