发明名称 |
Gruppe III-Nitridschichten mit strukturierten Oberflächen |
摘要 |
A fabrication method produces a mechanically patterned layer of group III-nitride. The method includes providing a crystalline substrate and forming a first layer of a first group III-nitride on a planar surface of the substrate. The first layer has a single polarity and also has a pattern of holes or trenches that expose a portion of the substrate. The method includes then, epitaxially growing a second layer of a second group III-nitride over the first layer and the exposed portion of substrate. The first and second group III-nitrides have different alloy compositions. The method also includes subjecting the second layer to an aqueous solution of base to mechanically pattern the second layer. <IMAGE> |
申请公布号 |
DE602004006043(T2) |
申请公布日期 |
2007.12.27 |
申请号 |
DE20046006043T |
申请日期 |
2004.02.24 |
申请人 |
LUCENT TECHNOLOGIES INC. |
发明人 |
CHOWDHURY, AREF;NG, HOCK MIN;SLUSHER, RICHARD ELLIOTT |
分类号 |
H01L21/205;H01L21/306;B81B1/00;C23F1/40;G02B6/12;G02B6/122;H01J1/30;H01J1/304;H01J9/02;H01L21/20 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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