| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical waveguide manufacturing method which can exclude complex processes, is low cost and is capable of improving the production efficiency, using a simple method. <P>SOLUTION: The manufacturing method of an optical waveguide 10 is such that a waveguide core 12 is formed on a lower substrate 11, with an unhardened thin film clad 14a formed on an upper substrate 13, and that the waveguide core 12 is covered thereon with the thin film clad-formed face of the upper substrate 13, with the thin film clad 14a flowing and covering the side face of the waveguide core 12. Between the lower substrate 11, the thin-film clad 14a and the upper substrate 13, a cavity 15 is formed, penetrating along the waveguide core 12, with the thin film clad 14a hardening, and with a conductive substance 16 being filled and hardened in the cavity 15. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
