| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator capable of being driven at a low voltage and increasing the amount of displacement of a diaphragm, a liquid droplet ejection head, a liquid droplet ejector, and a manufacturing method for them. SOLUTION: The electrostatic actuator comprises the diaphragm 22, and an individual electrode 12 which is arranged in the state of facing the diaphragm 22 via a gap. The electrostatic actuator displaces the diaphragm 22 by an electrostatic force which is generated by applying a voltage between the diaphragm 22 and the individual electrode 12. The diaphragm 22 is vibrated in a state in which a diaphragm end 22b of the diaphragm 22 is supported. The diaphragm 22 at the diaphragm end 22b is formed in such a shape as to be thinner than a central portion 22a of the diaphragm, except the diaphragm end 22b, so that a surface, on the other side of the individual electrode 12, of the diaphragm 22 can have a step structure. A recess 22c is formed on the side of a surface facing the individual electrode 12 in the central portion 22a, so that the side of the surface, facing the individual electrode 12, of the diaphragm 22 can also have a step structure. COPYRIGHT: (C)2008,JPO&INPIT
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