发明名称 |
Capacitive Ultrasonic Transducer and Endo Cavity Ultrasonic Diagnosis System Using the Same |
摘要 |
A capacitive ultrasonic transducer (c-MUT) comprising a silicon substrate and a transducer element which comprises transducer cells, each of which is constituted by a first electrode equipped on the top surface of the silicon substrate, a second electrode placed opposite to the first electrode with a predetermined gap therefrom and a membrane for supporting the second electrode, wherein a trench is equipped between the adjacent transducers and a conductive film is formed in the trench.
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申请公布号 |
US2007299345(A1) |
申请公布日期 |
2007.12.27 |
申请号 |
US20050666372 |
申请日期 |
2005.10.20 |
申请人 |
ADACHI HIDEO;WAKABAYASHI KATSUHIRO;MIZUNUMA AKIKO;OSAWA ATSUSHI;KAIMAI TATSUO;YASUNAGA SHINJI;NEMOTO KIYOSHI;MURAKAMI MIYUKI;TAMIYA KOUSEI;KONDO YU |
发明人 |
ADACHI HIDEO;WAKABAYASHI KATSUHIRO;MIZUNUMA AKIKO;OSAWA ATSUSHI;KAIMAI TATSUO;YASUNAGA SHINJI;NEMOTO KIYOSHI;MURAKAMI MIYUKI;TAMIYA KOUSEI;KONDO YU |
分类号 |
A61B8/14;H04R31/00 |
主分类号 |
A61B8/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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