| 摘要 |
A scanning system for confocal scanning of an object, comprising a light source ( 1 ), imaging optics ( 4 ) for focusing the light ( 5 ) radiated from the light source ( 1 ) onto the object ( 6 ) to be scanned, and further comprising an image detector ( 10 ) for detecting the light ( 7 ) from an object point ( 6' ) backscattered from the object ( 6 ) and passing through the same imaging optics ( 4 ). Means ( 11 ) for varying the length of the optical path are disposed in the optical path between the aperture array ( 3 ) and the object ( 6 ), by which means the optical distance of the image plane can be modified in a specific manner, and means are provided to influence the light ( 5 ) radiated by the light source onto the object ( 6 ) and/or the light ( 7 ) reflected from the object ( 6 ) and impinging on the sensor ( 10 ), in at least one of its characteristics, during an exposure period (t<SUB>B1</SUB>) for acquiring an image, and, during said exposure period (t<SUB>B1</SUB>), a profile holds which states a specific relationship between the characteristic of the light ( 5, 7 ) and the optical distance of the image plane from the imaging optics ( 4 ), and means ( 10 ) are provided which provide a measured value dependent on the characteristics of the light of the trajectory of observation ( 7 ) over the exposure period (t<SUB>B1</SUB>), a height coordinate (Z<SUB>s</SUB>) of the object ( 6 ) being reconstructable from the measured value achieved during said exposure period (t<SUB>B1</SUB>) and a reference value.
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