| 摘要 |
<p>A cooling apparatus for semiconductor or liquid crystal display (LCD) manufacturing equipment is provided with a circulation pipe having an input port and an output port in order to cool a chamber. The cooling apparatus includes a valve, a regulator, a vortex tube, a first temperature sensor and a controller. Thereby, the cooling apparatus can prevent environmental destruction by using compressed gas instead of existing refrigerants or cooling material, and does not require a heater for heating when supercooled, to thus save production costs and maintenance expenses.</p> |
