| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pellicle storage container in which difference in clamping force in a longitudinal direction of a tray and a cap to be clamped is reduced, and to provide a clamping member used for the pellicle storage container. <P>SOLUTION: The pellicle storage container for transporting a pellicle comprising a pellicle film and a support frame supporting the pellicle film has a tray 3, a cover 2 as a lid of the tray and a clamping member 4 to clamp the tray 3 and the cover 2. The clamping member 4 comprises a first pressing section 41 which, in an attached state, is in contact with the cover 2 to press the cover 2 toward the tray 3, a second pressing section 42 which, in an attached state, is in contact with the tray 3 to press the tray 3 toward the cover 2, and a jointing section 43 jointing the first pressing section 41 and the second pressing section 42. The thickness of the jointing section 43 at an open end portion in the longitudinal direction of the pellicle storage container is larger than the thickness in a portion between the two open ends. <P>COPYRIGHT: (C)2008,JPO&INPIT |
