| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide low dielectric polymers, and methods for producing the low dielectric constant polymers, dielectric materials and layers, and electronic components. <P>SOLUTION: An isomeric mixture of thermosetting monomers is provided, wherein the monomers have a core structure and a plurality of arms. The isomeric mixture of thermosetting monomers is polymerized, wherein polymerization comprises a reaction of an ethynyl group that is located in at least one arm of a monomer. In another aspect, spin-on low dielectric constant materials are formed having a first backbone with an aromatic moiety and a first reactive group and a second backbone with an aromatic moiety and a second reactive group, wherein the first and the second backbones are crosslinked by a crosslinking reaction via the first and the second reactive groups preferably without the use of any additional crosslinker and wherein a cage structure having at least eight atoms is covalently bound to at least one of the first and the second backbones. <P>COPYRIGHT: (C)2008,JPO&INPIT |
