| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an electrostatic actuator by which an electrostatic actuator having high discharging characteristics and drive durability can be manufactured by suppressing the deposition of metallic impurities, and to provide methods of manufacturing a liquid droplet discharging head and a liquid droplet discharging device. SOLUTION: The method has a step of forming a boron dope layer on one surface of a Si substrate 41 using boron diffusion sources 51 and in which the boron dope layer is formed as a vibrating plate by an etching stop technology. The boron diffusion source that has B<SB>2</SB>O<SB>3</SB>as a main component and Rh content of≤0.44 ppm is used as the boron diffusion source 51 when the boron dope layer is formed. COPYRIGHT: (C)2008,JPO&INPIT
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