| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrator for preventing a resonance frequency from being reduced as compared with a target frequency with time by utilizing an existing manufacturing line. SOLUTION: The method includes: a mounting process S1 for mounting a piezoelectric vibration element 12 in an insulating vessel 1 by a silicone adhesive 13; a frequency adjustment process S2 for increasing or decreasing the thickness of an excitation electrode film 21 to adjust the resonance frequency of the piezoelectric vibration element 12 to a prescribed value; a temporary attachment process S3 for attaching a metal lid 15 to the insulating vessel 1 to which the piezoelectric vibration element 12 is mounted; a sealing process S6 for filling the insulating vessel 1 with nitrogen gas and silicone vapor by leaving the insulating vessel 1 to which the metal lid 15 is attached temporarily in an atmosphere filled with nitrogen gas and silicone vapor; and a sealing process S7 for sealing the airtight vessel 1 with the metal lid 15. COPYRIGHT: (C)2008,JPO&INPIT
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