| 摘要 |
PROBLEM TO BE SOLVED: To clean a circuit board effectively without imposing stress, or the like. SOLUTION: A circuit board CQ is conveyed in the conveyance direction X by a substrate conveyance mechanism 200 having conveyance belts 9 and 10, and first and second nozzles NZL and NZU supported by nozzle transport mechanisms 300A and 300B are transported while opposing each other in the nozzle transporting direction Y intersecting the substrate conveyance mechanism X perpendicularly. Pressure of air injected from the first nozzle NZL toward the backside of the circuit board CQ is equalized to the pressure of air injected from the second nozzle NZU toward the surface of the circuit board CQ. Under a state where the circuit board CQ is held between both nozzles, air is injected to the surface and the backside of the circuit board CQ, thus cleaning the circuit board CQ. COPYRIGHT: (C)2008,JPO&INPIT
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