| 摘要 |
PROBLEM TO BE SOLVED: To reduce variations in sensitivity between an X- or Y-axis and a Z-axis by disposing the center of a magnetosensitive surface of a hole element at a predetermined distance inwardly from an edge of a magnetic body, thereby achieving a good sensitivity balance. SOLUTION: A semiconductor circuit 11 is constituted by a semiconductor substrate 13 and a plurality of hole elements 14a and 14b embedded in the semiconductor substrate 13. A polyimide layer 15 is provided on the semiconductor circuit 11. A magnetic convergent plate 12 is provided on a second metal film 16b provided on a first metal film 16a provided on the polyimide layer 15, so as to be disposed above the hole elements 14a and 14b. The centers of magnetosensitive surfaces of the plurality of hole elements are positioned within a region covering a distance 0.58 to 0.92 times as long as the radius of the magnetic convergent plate from the center of the magnetic convergent plate. This reduces variations in sensitivity between an X- or Y-axis and a Z-axis with respect to a diameter fluctuation or a displacement in a horizontal plane of the magnetic convergent plate, thereby achieving a good sensitivity balance. COPYRIGHT: (C)2008,JPO&INPIT
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