| 摘要 |
PROBLEM TO BE SOLVED: To increase an output charge amount without dividing upper and lower electrode membranes, in a piezoelectric membrane sensor having a membrane composed by stacking a lower electrode membrane, a piezoelectric membrane, and an upper electrode membrane. SOLUTION: By partially making the stack structure of the membrane 50 different by partially adding a membrane 60 such that, in a neutral axis J in the flexure of the membrane 50, a part positioned on the upper side and parts positioned on the lower side relative to the piezoelectric membrane 30 are formed by straddling the piezoelectric membrane 30 in the membrane 50, stress generated in the piezoelectric membrane 30 is set at the same polarity over the whole region of the membrane 50 in bending the membrane 50. COPYRIGHT: (C)2008,JPO&INPIT
|
