| 摘要 |
PROBLEM TO BE SOLVED: To provide an interference measuring apparatus capable of high-accuracy and wide dynamic range measurements of the surfaces shape of objects to be measured. SOLUTION: The interference measuring apparatus 1 is provided with light sources 11 and 12, lenses 21-25, an aperture 31, an optical wave synthesizer 41, an optical branching filter 42; a half mirror 43, an imaging part 51, an analytical part 52, a light-receiving part 61, a displacement detecting part 62, a piezoelectric actuator 71, a drive part 72, a mirror 73, a stage 81, a drive part 82, and a control part 90. The control part 90 controls the operation of adjusting the length differences between optical paths by the piezoelectric actuator 71 and the stage 81 via the drive parts 72 and 82, on the basis of detection results of the length differences between the optical paths by the displacement detection part 62 so that the length differences among optical paths sequentially take a plurality of target values. When the stage 81 performs a moving operation, the control part 90 also performs feedback control on a moving operation by the piezoelectric actuator 71 so that the length differences between optical paths take respective targeted value. COPYRIGHT: (C)2008,JPO&INPIT
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