发明名称 Semiconductor devices and method of manufacturing them
摘要 A semiconductor device is provided with a silicon substrate, with a surface for soldering the silicon substrate to a ceramic substrate, and an electrode making contact with the surface of the silicon substrate. The electrode comprises a first conductor layer, a second conductor layer, and a third conductor layer. The first conductor layer makes contact with the surface of the silicon substrate and includes aluminum and silicon. The second conductor layer makes contact with the first conductor layer and includes titanium. The third conductor layer is separated from the first conductor layer by the second conductor layer and includes nickel.
申请公布号 US2007296080(A1) 申请公布日期 2007.12.27
申请号 US20070808465 申请日期 2007.06.11
申请人 ULVAC, INC. 发明人 MIZUNO YOSHIHITO;KINOKUNI MASAHIRO;KOIKE SHINJI;MATSUMOTO MASAHIRO;YANAGIHORI FUMITSUGU
分类号 H01L23/48 主分类号 H01L23/48
代理机构 代理人
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