MASTERING TOOLS AND SYSTEMS AND METHODS FOR FORMING A CELL ON THE MASTERING TOOLS
摘要
Mastering tools and systems and methods for forming a cell on the mastering tools are provided. An exemplary method includes emitting a first laser light pulse from a laser for a first predetermined time interval such that at least a portion of the first laser light pulse forms the cell on the mastering tool. The cell has an opening size within a range of 10-100 micrometers and an aspect ratio less than or equal to 1.25.
申请公布号
WO2007149765(A2)
申请公布日期
2007.12.27
申请号
WO2007US71225
申请日期
2007.06.14
申请人
GENERAL ELECTRIC COMPANY;BASTAWROS, ADEL, F.;HAY, GRANT;KUMAR, KARKALA, ARUN;PETERS, PHIL, M.
发明人
BASTAWROS, ADEL, F.;HAY, GRANT;KUMAR, KARKALA, ARUN;PETERS, PHIL, M.