SILICON NITRIDE FILM ABRASIVE POWDER AND ABRADING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an abrasive powder and an abrading method having a high abrading speed to a silicon nitride film and capable of more selectively abrading the silicon nitride film than a silicon oxide film.

SOLUTION: The silicon nitride film abrasive powder, wherein water and silicon oxide as abrasive grains are included and pH is 3 or higher and 5.5 or less and the abrading method for abrading the silicon nitride film with the abrasive powder.

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