| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive grooving device capable of forming grid-like grooves on the whole surface of a grinding face of a lapping machine and requiring a space smaller than that of the lapping machine for installation. SOLUTION: This grooving device 20 is fixed in a main body part of the lapping machine 10 for supporting the polishing machine 12 rotatably. The grooving device divides the grinding face 14 of the lapping machine into four scopes formed by partitioning the grinding face 14 into a fan shape having a central angle of 90°and forms the grid-like grooves in each of the scopes sequentially. The grooving device is composed of a frame body 24 and a rectangular rail frame 26 supported on the frame body and movable vertically. The grooving device is provided with a pair of slide bars 32, 34 whose both ends are movably supported on guide rails 28, 30 provided in the rail frame and which can move individually and freely while maintaining a mutually and orthogonally crossing condition and a spindle unit supported on each slide bar movably at a position where these slide bars cross mutually. The grooving device is provided with a cutter supported by the spindle unit 36 and forming grooves in parallel with each slide bar on the grinding face of the polishing machine. COPYRIGHT: (C)2008,JPO&INPIT |
