Lithographischer Apparat und Verfahren zur Herstellung eines Artikels,申请号DE20036017407-传众专利搜索

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发明名称	Lithographischer Apparat und Verfahren zur Herstellung eines Artikels
摘要
申请公布号	DE60317407(D1)	申请公布日期	2007.12.27
申请号	DE20036017407	申请日期	2003.06.11
申请人	ASML NETHERLANDS B.V.	发明人	VOSTERS, PETRUS MATTHIJS HENRICUS;JACOBS, HERNES;VAN DER SCHOOT, HARMEN KLAAS;RUTGERS, PETER
分类号	G03F7/20;H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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