| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect acceleration in an excitation direction simultaneously with angular velocity of one shaft and acceleration in a detection direction, in one inertial sensor. <P>SOLUTION: An excitation-direction acceleration detection part 8 is arranged on objects vibrating in the excitation direction in phases opposite to each other, for instance, right and left mass parts 3 by interposing elastic bodies 25. Thereby, when acceleration is applied in the excitation direction, the right and left mass parts 3 normally vibrating at the same amplitude and in phases opposite to each other resultantly have amounts of displacements in the same phase, and acceleration in the excitation direction can be detected by detecting the amounts of displacements in the same phase as a change of capacitance by the excitation-direction acceleration detection part 8. <P>COPYRIGHT: (C)2008,JPO&INPIT |
