发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To enhance the driving performance of a MOSFET and suppress variations in characteristics. SOLUTION: A semiconductor device comprises a semiconductor layer 1, a MOSFET formed on a surface (100) of the semiconductor layer 1 having a channel length direction <110>, and an element isolation region surrounding the MOSFET. The element isolation region having a channel widthwise direction of the MOSFET has a dummy layer 3 formed as part of the semiconductor layer 1 and not formed with an element, and an element isolation insulating layer 2 formed to have minimum processed dimensions between the MOSFET and the dummy layer 3. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007335661(A) 申请公布日期 2007.12.27
申请号 JP20060166194 申请日期 2006.06.15
申请人 TOSHIBA CORP 发明人 FUJII SHINJI;YAMAGUCHI AKIRA;CHIKAMATSU NAOHITO;TAKEGAWA YOICHI
分类号 H01L29/78;H01L21/76;H01L27/08;H01L29/786 主分类号 H01L29/78
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