| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid droplet discharge head capable of efficiently forming a flat and smooth oscillating board. SOLUTION: This method for manufacturing leaves a support 79 at the central part of a space being a pressure room 50 by forming a peripheral channel 72. Then, a filling material 78 is filled in the peripheral channel 72, and the oscillating board is formed on the surface of the support 79 and the filling material 78. As the filling material 78 is supported by the support 79, even when a process accompanied with heat treatment is performed after the oscillating board 48 is formed, shrinking deformation by the heat treatment as well as other deformation is hardly generated, and the smoothness and flatness of the surface of a silicon substrate 70 can be furthermore held. By using both the support 79 and the filling material 78 like this, the smoothness and flatness of the oscillating board 48 formed on the silicon substrate 70 are improved. COPYRIGHT: (C)2008,JPO&INPIT
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