发明名称 Method and System for Controlled Plating of Vias
摘要 Methods and systems for controlled formation of a resist in a via. In one embodiment, a method for plating at least a portion of the inside of a via formed in an object may include filling the via with a resist capable of selective three-dimensional polymerization. The resist may be selectively polymerized, and developed. When the resist is developed, only a portion of the resist is removed according to whether the portion is polymerized, thereby leaving a remaining portion in the via and forming a desired structure in the via.
申请公布号 US2007298601(A1) 申请公布日期 2007.12.27
申请号 US20060425799 申请日期 2006.06.22
申请人 BOOTH ROGER A;DOYLE MATTHEW S;HEFNER JESSE M;LANDLIN LYNN R;LIANG THOMAS W;PATEL ANKUR K 发明人 BOOTH ROGER A.;DOYLE MATTHEW S.;HEFNER JESSE M.;LANDLIN LYNN R.;LIANG THOMAS W.;PATEL ANKUR K.
分类号 H01L21/44 主分类号 H01L21/44
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