发明名称 BANDWIDTH CONTROL DEVICE
摘要 <p>A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.</p>
申请公布号 WO2007149282(A2) 申请公布日期 2007.12.27
申请号 WO2007US13875 申请日期 2007.06.11
申请人 CYMER, INC.;FOMENKOV, IGOR, V.;PARTLO, WILLIAM, N.;REILEY, DANIEL, J.;HOWEY, JAMES, K.;AGULIAR, STANLEY, C. 发明人 FOMENKOV, IGOR, V.;PARTLO, WILLIAM, N.;REILEY, DANIEL, J.;HOWEY, JAMES, K.;AGULIAR, STANLEY, C.
分类号 H01S3/10 主分类号 H01S3/10
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