ELECTROCHEMICAL SAMPLING HEAD OR ARRAY OF SAME,申请号WO2007US71458-传众专利搜索

发明名称	ELECTROCHEMICAL SAMPLING HEAD OR ARRAY OF SAME
摘要	<p>A sampling head, and/or an array including same for use in electrochemical deposition of various metal(s) on wafers or other substrates suitable for use in microelectronic devices or components thereof.</p>
申请公布号	WO2007149810(A1)	申请公布日期	2007.12.27
申请号	WO2007US71458	申请日期	2007.06.18
申请人	ADVANCED TECHNOLOGY MATERIALS, INC.;MKS INSTRUMENTS;HOLBER, WILLIAM, MARTIN;KING, MACKENZIE;VAN BUSKIRK, PETER, C.	发明人	HOLBER, WILLIAM, MARTIN;KING, MACKENZIE;VAN BUSKIRK, PETER, C.
分类号	G01N27/413	主分类号	G01N27/413
代理机构		代理人
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