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发明名称
Pellicle for lithography
摘要
申请公布号
EP1843201(A8)
申请公布日期
2007.12.26
申请号
EP20070005629
申请日期
2007.03.19
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
SHIRASAKI, TORU
分类号
G03F1/62
主分类号
G03F1/62
代理机构
代理人
主权项
地址
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