| 摘要 |
<p>A structure of a high-reliability RF(Radio Frequency) generator is provided to store a high-speed event permanently which is generated in a moment before a defect is generated. A structure of a high-reliability RF generator(10) is composed of driver modules(14-1~14-4) for generating RF power; a power amplifier module for amplifying the RF power; a data obtaining module having a first communication port(30), receiving diagnosis data related to the power amplifier module, and storing data received for the predetermined time before receiving a defect through the first communication port; inductive clamping circuits(16-1~16-4) communicating with the output of the power amplifier module; and a power control module(36) for controlling a power source supplying power to a power amplifier and communicating with the data obtaining module. Diagnosis data includes at least one of voltage, current, phase angle, temperature, and parameter.</p> |
