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发明名称
Polishing Pad
摘要
申请公布号
EP1522385(B1)
申请公布日期
2007.12.26
申请号
EP20040256170
申请日期
2004.10.06
申请人
ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.
发明人
JAMES, DAVID B.;KULP, MARY JO
分类号
B24D3/28;B24B37/00;B24B37/04;B24D3/26;B24D13/14;C08G18/10;H01L21/304;C08G18/48;C08G18/83;C08J5/14
主分类号
B24D3/28
代理机构
代理人
主权项
地址
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