发明名称 Vaccum coating apparatus
摘要 <p>The vacuum coating plant (1) has a transporting system to take a flat substrate (11) through a vacuum chamber (2). The system has several parallel rollers (e.g. 9). There is a drive (10) located outside the vacuum coating plant. There is at least one magnetic clutch (45, 46, 47) between the drive and at least one of the rollers.</p>
申请公布号 EP1870487(A1) 申请公布日期 2007.12.26
申请号 EP20060012805 申请日期 2006.06.22
申请人 APPLIED MATERIALS GMBH & CO. KG 发明人 HENRICH, JUERGEN;SAUER, ANDREAS;WURSTER, HARALD;HABERKORN, EDGAR
分类号 C23C14/56 主分类号 C23C14/56
代理机构 代理人
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