<p>The vacuum coating plant (1) has a transporting system to take a flat substrate (11) through a vacuum chamber (2). The system has several parallel rollers (e.g. 9). There is a drive (10) located outside the vacuum coating plant. There is at least one magnetic clutch (45, 46, 47) between the drive and at least one of the rollers.</p>
申请公布号
EP1870487(A1)
申请公布日期
2007.12.26
申请号
EP20060012805
申请日期
2006.06.22
申请人
APPLIED MATERIALS GMBH & CO. KG
发明人
HENRICH, JUERGEN;SAUER, ANDREAS;WURSTER, HARALD;HABERKORN, EDGAR