| 摘要 |
A micro-spray cooling system beneficial for use in testers of electrically stimulated integrated circuit chips is disclosed. The system includes micro-spray heads disposed about a probe head, which provide a coolant flow onto the IC (160; 360). A flow inducing injector (190; 362; 462; 562; 862) is provided that directs a fluid jet onto zones where stagnation of the coolant flow is present. This reduces or eliminates any stagnation points and enhance temperature uniformity over the area of the IC.
|
