发明名称 |
Piezoelectric driven MEMS device |
摘要 |
It is made possible to provide a piezoelectric driven MEMS device having the distance between the action end and the fixed electrode which is kept constant regardless of whether the residual strain is large or small and having a mechanism which is excellent in reproducibility and reliability. Two piezoelectric driven actuators each having a folded beam structure are disposed in parallel and in a line-symmetric manner, and connected to each other in the vicinity of an action end.
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申请公布号 |
EP1870918(A1) |
申请公布日期 |
2007.12.26 |
申请号 |
EP20070005567 |
申请日期 |
2007.03.19 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
KAWAKUBO, TAKASHI;NAGANO, TOSHIHIKO;NISHIGAKI, MICHIHIKO |
分类号 |
H01H57/00 |
主分类号 |
H01H57/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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