| 摘要 |
A high-frequency power supply system includes an abnormality detection device (3) for detecting abnormality generated in a circuit of the load L side from the output terminal A of a high-frequency power source (1). The abnormality detection device (3) includes: a first detection unit (21) for detecting a voltage value Vf of a high-frequency progressive wave; a second detection unit (22) for detecting a voltage value Vr of a high-frequency reflection wave; a reflection coefficient calculation unit (23) and a differentiation calculation unit (24) for calculating a differentiation value dGamma/dt of a reflection coefficient from the progressive wave voltage value Vf and the reflection wave voltage value Vr; and an abnormality judgment unit (25) for judging whether abnormality is present according to the differentiation value dGamma/dt of the reflection coefficient. When an abnormality detection signal is outputted from the abnormality detection device (3) to the high-frequency power source (1), the power output operation of the high-frequency power source (1) is stopped.
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