发明名称 Lens housing with integrated thermal management
摘要 <p>An optical receiver is provided, which includes a housing, an objective lens (120) situated in the housing, a solid immersion lens (SIL) (126; 226; 326; 426; 526; 626) mounted onto the housing, and thermal management element affixed to the housing to control the temperature of the SIL. The thermal management apparatus or element may be a coolant conduit (214; 3145; 414; 514; 614), a thermoelectric cooling (TEC) device (316; 416; 516), etc. A coolant spray may also be provided to spray the imaged specimen.</p>
申请公布号 EP1870752(A1) 申请公布日期 2007.12.26
申请号 EP20070011993 申请日期 2007.06.19
申请人 CREDENCE SYSTEMS CORPORATION 发明人 LEE, BIRK
分类号 G02B21/28;G02B21/30;G02B7/00 主分类号 G02B21/28
代理机构 代理人
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