发明名称 |
Electron beam depicting method, mother die manufacturing method, mother die, metallic mold manufacturing method, metallic mold and optical element |
摘要 |
There is described a method for depicting a predetermined pattern, such as a diffraction pattern employed in an optical element, on a substrate. The method includes the steps of: acquiring shape data of the predetermined pattern; generating a first input signal for deflecting an electron beam emitted from an electron gun in a main-scanning direction, and a second input signal for deflecting the electron beam in a sub-scanning direction, based on the shape data of the predetermined pattern; adjusting an alternating bias signal, having a specific frequency, according to the shape data of the predetermined pattern; superposing the alternating bias signal on the second input signal; and deflecting the electron beam emitted from the electron gun in the sub-scanning direction according to the second input signal on which the alternating bias signal is superposed, while scanning the electron beam by deflecting it in a main-scanning direction.
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申请公布号 |
US7312447(B2) |
申请公布日期 |
2007.12.25 |
申请号 |
US20040796885 |
申请日期 |
2004.03.08 |
申请人 |
KONICA MINOLTA HOLDINGS INC. |
发明人 |
MASUDA OSAMU;FURUTA KAZUMI |
分类号 |
G02B5/18;H01J37/29;G02B5/32;G03C5/00;G03F7/00;G03F7/20;H01J37/317;H01L21/027 |
主分类号 |
G02B5/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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