发明名称 Optical position measuring system with a detector arrangement and measuring graduation to produce partial filtering of undesired harmonics
摘要 An optical position measuring system that includes a measuring graduation and a scanning unit that is movable in relation to the measuring graduation in a measuring direction. The scanning unit includes a light source that generates light towards the measuring graduation so that scanning signals result from an interaction of the light with the measuring graduation and an opto-electronic detector arrangement has a plurality of detector element units, whose geometric shape and/or arrangement has been selected in such a way that through them at least a partial filtering of undesired harmonics out of the scanning signals results. The measuring graduation includes an arrangement of graduation areas with different optical properties, which is periodic in the measuring direction and has a periodicity TPM and which has been selected in such a way that through them at least a partial filtering of undesired harmonics out of the scanning signals results.
申请公布号 US7312436(B2) 申请公布日期 2007.12.25
申请号 US20050210122 申请日期 2005.08.23
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 TOVAR HEINZ
分类号 G01D5/34 主分类号 G01D5/34
代理机构 代理人
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