| 摘要 |
A thermal plasma apparatus is provided to apply the metal nanoparticles as a getter for removing impure gases in flat panel display devices by preparing metal nanoparticles using thermal plasma. In a thermal plasma apparatus comprising a power supply part, a plasma torch part(120), a reaction chamber, a holder support, a holder, a vacuum pump, a cooling tube, a collection part, a scrubber, and a control part, the thermal plasma apparatus is characterized in that: the apparatus further comprises an adaptor separably installed between the torch part and the reaction chamber to supply a liquid phase sample or a solid phase sample; the plasma torch part is a thermal cathode type plasma torch part including an end portion(122) made from tungsten, a cathode rod(121) made from copper and installed in an inner central part of the plasma torch part, and an anode rod(123) made of copper and installed on a periphery of the cathode rod to generate an electric discharge together with the cathode rod; the holder is made from graphite that can endure a high temperature atmosphere and can be transferably operated through an electric current; the holder is transferably operated to adjust an arc length by varying a distance between the cathode rod and the anode rod; and the holder is converted from a transfer mode into a non-transfer mode while performing a process by applying power to the cathode rod and the anode rod without applying the power to the holder support.
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