PIXEL ARRAY PREVENTING THE CROSS TALK BETWEEN UNIT PIXELS AND IMAGE SENSOR USING THE PIXEL

摘要

A pixel array having a three-dimensional structure for signal interference between unit pixels is provided to transfer a charge corresponding to an image signal detected by one wafer to another wafer without causing distortion by performing each optimum process on a first wafer for embodying a photodiode and a transfer transistor and a second wafer for embodying transistors for converting an image charge detected by the transfer transistor into an electric signal. A plurality of photodiodes(14) generate charges corresponding to incident image signals. A plurality of transfer transistors respectively transfer the charges generated by the plurality of photodiodes to a corresponding floating diffusion region(15). A plurality of STIs(shallow trench isolations) surround one of the plurality of photodiodes and a transfer transistor connected to the one photodiode. A first super contact(30) is extended from the lower part of the plurality of STIs to the lower surface of the substrate. A second super contact(16) penetrates a partial region of the plurality of STIs and the first super contact. A first wafer includes the abovementioned elements. The charges accumulated in the floating diffusion region are transferred to a second wafer through the second super contact. An insulation material can be filled in the first super contact, composed of a nitride layer or a dual layer of a nitride layer and an oxide layer.