发明名称 LINEAR VACUUM DEPOSITION SYSTEM
摘要 Embodiments of a vacuum conveyor system are provided herein. In one embodiment a vacuum conveyor system includes a first vacuum sleeve having a plurality of rollers that support and move substrates through the first vacuum sleeve. A port is provided for sealably coupling the first vacuum sleeve to a process chamber. A first substrate handler is disposed proximate the port. Multiple ports may be provided for sealably coupling the first vacuum sleeve to a plurality of process chambers. A dedicated substrate handler is provided for each process chamber. A second vacuum sleeve may be sealably coupled to an opposing side of the process chambers. The vacuum conveyor system may be modular with independent modules linked via load lock chambers. The plurality of rollers may compensate for any sag of the leading edge of a substrate being transported thereupon.
申请公布号 KR20070120556(A) 申请公布日期 2007.12.24
申请号 KR20077024736 申请日期 2006.03.14
申请人 APPLIED MATERIALS INC. 发明人 BLONIGAN WENDELL T.;WHITE JOHN M.
分类号 H01L21/683 主分类号 H01L21/683
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