| 摘要 |
A heat treatment apparatus is provided with a treatment container, which stores a plurality of subjects to be treated at multiple levels and performs prescribed heat treatment to the subjects; a cylindrical heater arranged to cover the treatment container for heating the subjects; a heat exhausting system for exhausting a space between the heater the treatment container of the atmosphere; and a cooling means for blowing a cooling fluid into the space for cooling the treatment container. The heater is provided with a cylindrical heat insulating material, and a heat element arranged on the inner circumference of the heat insulating material. The cooling means is provided with a plurality of jetting nozzles embedded in the heat insulating material. Each jetting nozzle is formed in a shape wherein the inlet and the outlet do not linearly connected. |
