| 摘要 |
A cassette conveyance apparatus is provided to reduce the number of robots to be arranged for each stocker by integrating the robots capable of carrying a cassette into the cassette conveyance apparatus. A cassette conveyance apparatus(200) includes a stage(230), robots, a first driving unit(260), and a second driving unit(240). The robots are arranged on the stage. The first driving unit moves the stage along the rail. The second driving unit drives the robots. The cassette conveyance apparatus further includes a fork(250), first and second robot arms(252,251), and a turn table(253). The fork transports a cassette(320). The first and second robot arms operate the fork. The cassette can be laid on the turn table. The first driving unit includes a high-frequency induction distributing device for non-contact power supply.
|
