| 摘要 |
Provided is a placing table structure having a replaceable heating plate by removably arranging the heating plate in a heating plate storing chamber. A placing table structure (29) is provided with a placing table (32), which is arranged inside a processing chamber (4) and places a subject (W) to be treated, for performing prescribed heat treatment to the subject, and a cylindrical supporting column (30) which supports the placing table by making the placing table stand from the bottom portion of the processing chamber. The placing table (32) is provided with a heating plate (40) having a heating body (38) composed of an electrical heating source embedded in a heat resistant material, and a heating plate storing chamber (42) composed of a heat resistant anticorrosive material for removably storing the heating plate. The heating plate storing chamber (42) includes a chamber main body (76) having an opening, and a cover section (78) attached to the chamber main body (76). Thus, the heating plate (40) is permitted to be replaced. |
