DEPOSITION APPARATUS AND METHOD FOR COATING OXIDES ON PHOSPHOR POWDERS

摘要

An apparatus and a method of deposition is provided to reduce structural defects of powdered fluorescent substance by coating oxidized layer having excellent permittivity on the surface of powdered fluorescent substance used for displays. An apparatus is equipped with a source gas supply pipe(100), a reactant gas supply pipe(200), a purge gas supply pipe and a reactor(300) for depositing coatings on powdered fluorescent substance. The reactor has a mesh to improve yield of fluorescent substance. The source gas supply pipe and a reactant gas supply pipe are connected to the front end of the reactor while the purge gas supply pipe is connected to the source gas supply pipe and the reactant gas supply pipe to reduce structural defects of the fluorescent surface.